一种大行程微位移驱动器

Large stroke micro-displacement driver

Abstract

本实用新型涉及一种大行程微位移驱动器。它由步进电机、谐波减速器、丝杆螺母副和推杆顺序连接,丝杠螺母副置于精密导轨上,丝杠螺母副和精密导轨之间有一个L形隔板,位移输出的推杆和隔板相连。此种微位移驱动器只有一个控制步进电机的单一控制单元,输出位移通过电机控制器和谐波减速器的两级细分后可达到纳米量级。另外,机械式的结构又保证了驱动器具有几十毫米的位移行程。
The utility model relates to a large stroke micro-displacement driver comprising a stepping motor, a harmonic wave decelerator, a screw rod nut and a push rod connected in sequence; the screw rod nut is arranged on a precision guide rail; an L-shaped isolation plate is provided between the screw rod nut and the precision guide rail; the push rod of displacement output is connected with the isolation plate; the micro-displacement driver only has a single control unit controlling the stepping motor; the output displacement is subdivided in two stages by the motor controller and the harmonic wave decelerator, thereby reaching a nanometer magnitude. Furthermore, a mechanic structure ensures the driver to have the displacement stroke of dozens of millimeters.

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    CN-105071589-ANovember 18, 2015苏州玖典智能科技有限公司快速精确线性运动装置